Stylus profilometer - Dektak XT
Technical Data | Stylus profilometer |
| Company: | Bruker Corporation |
| Model: | Dektak XT |
| Application: | Tactile determination of the surface topography (layer thickness, waviness and roughness...) and 3D mapping on all solid surfaces |
| Measurement Technique: | Stylus profilometry (contact measurement) |
| Sample Viewing: | Digital magnification, 0.275 to 2.2 mm vertical FOV |
| Stylus Sensor: | Low Inertia Sensor (LIS 3) |
| Stylus Force: | 1 to 15 mg with LIS 3 sensor |
| Stylus Options: | Stylus radius options from 50 nm to 25 µm; High Aspect Ratio (HAR) tips 200 µ m x 20 µ m; Custom tips available upon request |
| Sample X/Y Stage: | Manual 100 mm (4 in.) X/Y, manual leveling; Motorized 150 mm (6 in.) X/Y, manual leveling |
| Sample R-Theta Stage: | Manual, continuous 360 degrees; Motorized, continuous 360 degrees |
| Scan Length Range: | 55 mm (2 in.); 200 mm (8 in.) with scan stitching capability |
| Data Points Per Scan: | 120,000 maximum |
| Max. sample size (W x L x H): | 200 x 200 x 50 mm³ |
| Step Height Repeatability: | 4Å, 1 sigma on steps ≤1 µm (30 scans using a 12.5 µm stylus) |
| Vertical Range: | 1 mm (0.039 in.) |
| Vertical Resolution: | 1Å (@ 6.55 µm range) |
| Additional information: | The unit is enclosed and mounted on a vibration damper. |
| Accessories: | Styli of different radii and designs, reference sample |