Stylus profilometer - Dektak 150
Technical Data | Stylus profilometer |
| Company: | Bruker Corporation |
| Model: | Dektak 150 |
| Measurement Technique: | Contact stylus profilometry |
| Measurement Capability: | Two-dimensional surface profile measurement |
| Sample Viewing: | 640 x 480-pixel (1/3in.-format) camera, USB |
| Stylus Sensor: | Low-Inertia Sensor (LIS 3) |
| Stylus Force: | 1 to 15mg with LIS 3 sensor |
| Stylus Options: | Stylus radius options from 50nm to 25µm; High Aspect Ratio (HAR) tips 10µm x 2µm and 200µm x 20µm |
| Sample Stage: | Manual X/Y/ Ɵ , 100 x 100mm X-Y translation, 360° rotation, manual leveling |
| Scan Length Range: | 55mm standard; up to 200mm with stitching option |
| Data Points Per Scan: | 120,000 maximum |
| Max. Sample Thickness: | Up to 90mm, depending on configuration |
| Max. Wafer Size: | 150mm (200mm with Advanced Automation Package) |
| Step Height Repeatability: | ≤6Å (D150); ≤4Å (D150+ option); 1 sigma on 0.1µm step |
| Vertical Range: | 524um |
| Vertical Resolution: | 1Å max. (at 6.55µm range) |
| Additional information: | The unit is enclosed and mounted on a vibration damper. |