Parylene coater
Physical Vapor Deposition (organic)
Technical Data | Parylene coater |
| Company: | Specialty Coating SystemsTM A KISCO Company |
| Model: | SCS Labcoter® 2 (PDS 2010) |
| Application: | Advanced conformal parylene coating (well suited for a range of applications, including circuit boards, sensors, wafers, medical devices and elastomeric components for research, development, and repair) |
| Samples: | Universal; max. 15 x 15 cm² |
| Thickness range: | Several hundred angstroms to 75 μm |
| Homogeneity: | < 20% |
| Coating rate: | 1 – 3 μm/h (Parylen-N); 5 μm/h (Parylen-C) |
| Functionality: | Functionality: |
| Chamber size: | 30.5 x 30.5 cm (approximately 22 L capacity) |
| Dimer capacity: | Up to 125 g |
| Vacuum Pump: | 6.9 CFM / 11.72 m3/h, rotary vane |
| Controls: | Semiautomatic, microprocessor temperature and pressure controls, fault alarm monitoring |