Optical profilometer

FRT MicroProf200

Measurement Method  

The MicroProf® works as an optical profilometer (2D) as well as an imaging measuring instrument (3D) by means of a scanning process or a direct Imaging field-of-view sensor. Roughness and waviness can be determined in 2D or 3D according to DIN EN ISO standards. Larger areas can be measured by using the integrated lateral stitching function.

sensor heads :

• FRT CFM DT is a combined confocal microscope and white light Interferometer

          interferometric measurement

                measuring range z=max 600µm

                resolution (x,y)>0,5µm, resolution (z)>0.3nm,

         confocal microscope

                measuring range z=max 400µm

                resolution (x,y)>0,23µm, resolution (z)>1nm

• FRT FTR  an optical thin film reflectometer for the thickness measurement

         reflectometer

                measuring range  z=20nm-130µm

                resolution (z)>1nm

                spot=1mm