skip to content

Atomic Force Microscopy (AFM) - Asylum

Technical Data

Atomic Force Microscopy (AFM)

Company: Asylum Research (Oxford Instruments)
Model: MFP-3D
Max scan field: 90 µm x 90 µm x 15 µm
Positioning camera: Field of view: 2200 µm x 1600 µm
Resolution: 3 µm
XY-Stage: XY-Table
XY-Positioning: micrometer screw
Laser wavelength: Super luminescent diode: 860 nm

Available Modes

Mode Meaning Investigated Property
Contact Contact Topography (Elast. via phase, frict. via lateral)
AC Non-Contact Topography
Tapping Semi-Contact Tapping Topography (Elasticity via Phase)
Current imaging (C-AFM) Conductivity measurement el. Conductivity
I/V Spectroscopy Current Voltage dependance el. Conductivity
TDDB Time Dependend Dielectric Breakdown el. Insulation
SKPM Surface Kelvin Probe Microscopy Surface Potential
MFM Magnetic Force Microscopy Magnetism
EFM Electrostatic Force Microscopy Electrostatic distribution
Force spectroscopy Force-Distance curve Elasticity
Force mapping Force-Distance curve for matrix Elasticity
Dual AC AC in first and second order resonance Several (i.e. short- vs long-range forces)
DART Dual-AC Resonance Tracking Several (i.e. Ferroelectricity)
loss tangent imaging Dissipation of energy of tip-sample interaction Dielectric constant
LFM Lateral Force Microscopy Friction
PFM Piezoresponse Force Microscopy Ferroelectricity
Nanolithography Change of sample properties -
Nanomanipulation Sample manipulation -

Available expansion modules

Module name Application Specifics
Closed Fluid Cell Analysis in fluid/protective gas environment  
Cooler Heater Temperature dependend Measurement Range: -15°C - 120°C
Variable Field Module Analysis under external tangential magnetic field Range: -7000 G - 7000 G (10000 G = 1 T)
Probe Station in-situ Two- and Three-Point electrical measurements  
Nanoscale TDDB Time Dependend Dielectric Breakdown Range: -150 V - +150 V